METHOD TO ELECTRODEPOSIT METALS USING IONIC LIQUIDS

The present invention relates to a method to electroplate or electropolish a metal on a substrate wherein an ionic liquid selected from the group of N+R1R2R3R4 X- or N+R5R6R7R8 Y- is employed as electrolyte, and a metal salt added to the ionic liquid is employed as the metal source or a metal anode...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SPEELMAN, JOHANNA CHRISTINA, VAN STRIEN, CORNELIS JOHANNES GOVARDUS, KUZMANOVIC, BORIS, BARTEL, COLIN ERIC, ZEITLER, MICHAEL
Format: Patent
Sprache:eng ; fre
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