METHOD TO ELECTRODEPOSIT METALS USING IONIC LIQUIDS
The present invention relates to a method to electroplate or electropolish a metal on a substrate wherein an ionic liquid selected from the group of N+R1R2R3R4 X- or N+R5R6R7R8 Y- is employed as electrolyte, and a metal salt added to the ionic liquid is employed as the metal source or a metal anode...
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