FLUID CONTROL DEVICE

There is provided a fluid control device having no dead volume. A fluid flow path is constituted by a loop-shaped flow-path portion L, and a first inlet flow-path portion B1, a second inlet flow-path portion B2 and a common outlet flow-path portion B3 which are communicated with a first inlet A1, a...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: KOYOMOGI, MUTSUNORI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!