MANUFACTURE OF CADMIUM MERCURY TELLURIDE
A method of manufacture of cadmium mercury telluride (CMT) is disclosed. The method involves growing one or more buffer layers on a substrate by molecula r beam epitaxy (MBE). Subsequently at least one layer of cadmium mercury telluride, Hg1-XCdXTe where x is between (0) and (1) inclusive, is grown...
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Format: | Patent |
Sprache: | eng ; fre |
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Zusammenfassung: | A method of manufacture of cadmium mercury telluride (CMT) is disclosed. The method involves growing one or more buffer layers on a substrate by molecula r beam epitaxy (MBE). Subsequently at least one layer of cadmium mercury telluride, Hg1-XCdXTe where x is between (0) and (1) inclusive, is grown by metal organic vapour phase epitaxy (MOVPE) The use of MBE to grow buffer layers allows a range of substrates to be used for CMT growth. The MBE buffe r layers provide the correct orientation for later MOVPE growth of CMT and als o prevent chemical contamination of the CMT and attack of the substrate during MOVPE. The method also allows for device processing of the CMT layers to be performed with further MOVPE growth of crystalline CMT layers and/or passivation layers. The invention also relates to new devices formed by the method. |
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