BUCKLED ACTUATOR WITH ENHANCED RESTORING FORCE

An electrostatic actuator device including a stationary support (11) and a buckled, moveable support mounted positioned to enter into contact with the stationary support (13). At least three electrodes (15, 17, 19) are employed. The first (15) is mounted on the moveable support (13) and a second (17...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: HERB, WILLIAM R, OHNSTEIN, THOMAS R, CABUZ, CLEOPATRA
Format: Patent
Sprache:eng ; fre
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!