METHOD FOR MAKING UHP TUNGSTEN HEXAFLUORIDE

This invention is directed to a method for producing UHP tungsten hexafluoride by introducing an amount of crude tungsten hexafluoride to an evaporating process for separation into an amount of tungsten hexafluoride-containing volatile impurities and an amount of non-volatile metallic impurities; pa...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SALIM, SATERIA, HOLMER, ARTHUR EDWARD
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMISTRY COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F INORGANIC CHEMISTRY METALLURGY
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