ARC SUPPRESSOR FOR ELECTRON GUN

An arc suppressor is provided for an electron gun of the type used e.g. in semiconductor lithography equipment. The arc suppressor prevents damaging emission properties of the electron gun either due to variation of the cathode work function or any damage to the emitter apex. The arc suppressor incl...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	GESLEY, MARK A, HOWARD, GLEN E
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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