ELECTRONIC ARTICLES CONTAINING A FLUORINATED POLY(ARLENE ETHER) DIELECTRIC

An electronic article such as a multichip module or an integrated circuit chip has a multilayer interconnect with multiple layers of conductive material made of a fluorinated poly(arylene ether) having a repeat unit such as (I).

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Bibliographische Detailangaben
Hauptverfasser: VO, LANCHI P, SOVISH, RICHARD C, MERCER, FRANK W, GOODMAN, TIMOTHY D, LAU, ALDRICH N. K
Format: Patent
Sprache:eng ; fre
Schlagworte:
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Beschreibung
Zusammenfassung:An electronic article such as a multichip module or an integrated circuit chip has a multilayer interconnect with multiple layers of conductive material made of a fluorinated poly(arylene ether) having a repeat unit such as (I).