ELECTRONIC ARTICLES CONTAINING A FLUORINATED POLY(ARLENE ETHER) DIELECTRIC
An electronic article such as a multichip module or an integrated circuit chip has a multilayer interconnect with multiple layers of conductive material made of a fluorinated poly(arylene ether) having a repeat unit such as (I).
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Hauptverfasser: | , , , , |
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Format: | Patent |
Sprache: | eng ; fre |
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Zusammenfassung: | An electronic article such as a multichip module or an integrated circuit chip has a multilayer interconnect with multiple layers of conductive material made of a fluorinated poly(arylene ether) having a repeat unit such as (I). |
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