METHOD AND APPARATUS FOR SILICON NITRIDE PRECURSOR SOLIDS RECOVERY

Method and apparatus are provided for collecting reaction product solids entrained in a gaseous outflow from a reaction situs, wherein the gaseous outflow includes a condensable vapor. A condensate is formed of the condensable vapor on static mixer surfaces within a static mixer heat exchanger. The...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NICHOLSON, JOHN M, PREDMESKY, RONALD L, CROSBIE, GARY M
Format:	Patent
Sprache:	eng ; fre
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY METALLURGY MIXING, e.g. DISSOLVING, EMULSIFYING, DISPERSING NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL THEIR RELEVANT APPARATUS TRANSPORTING
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