MAGNETSYSTEM, SPUTTERVORRICHTUNG UND VERFAHREN
Gemäß verschiedenen Ausführungsformen kann ein Magnetsystem (100) für eine Sputtervorrichtung (300) aufweisen: ein Gehäuse (406g), welches einen Gehäuseinnenraum (406h) aufweist; einen Magnetträger (102), welcher in dem Gehäuseinnenraum (406h) angeordnet und mittels des Gehäuses (406g), vorzugsweise...
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| creator | SANDER THORSTEN GROSSER GÖTZ SCHNEIDER KLAUS HAUSWALD RALF |
| description | Gemäß verschiedenen Ausführungsformen kann ein Magnetsystem (100) für eine Sputtervorrichtung (300) aufweisen: ein Gehäuse (406g), welches einen Gehäuseinnenraum (406h) aufweist; einen Magnetträger (102), welcher in dem Gehäuseinnenraum (406h) angeordnet und mittels des Gehäuses (406g), vorzugsweise ortsfest zu diesem, abgestützt ist; eine Entfeuchtungsvorrichtung, welche an den Gehäuseinnenraum (406h) angrenzt oder darin angeordnet ist, zum Trocknen des Gehäuseinnenraums (406h).
Disclosed herein are systems, devices, and methods for a magnet system for a sputtering device. The disclosed magnet system may include a housing having a housing interior. The magnet system may also include a magnet holder disposed in the housing interior and supported by the housing in a preferably stationary manner. The magnet system may also include a dehumidifying device adjacent to or disposed in the housing interior for drying the housing interior. |
| format | Patent |
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Disclosed herein are systems, devices, and methods for a magnet system for a sputtering device. The disclosed magnet system may include a housing having a housing interior. The magnet system may also include a magnet holder disposed in the housing interior and supported by the housing in a preferably stationary manner. The magnet system may also include a dehumidifying device adjacent to or disposed in the housing interior for drying the housing interior.</description><language>ger</language><subject>CHEMICAL SURFACE TREATMENT ; CHEMISTRY ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL ; COATING MATERIAL WITH METALLIC MATERIAL ; COATING METALLIC MATERIAL ; DIFFUSION TREATMENT OF METALLIC MATERIAL ; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL ; METALLURGY ; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><creationdate>2023</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230726&DB=EPODOC&CC=BE&NR=1030155A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,778,883,25547,76298</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20230726&DB=EPODOC&CC=BE&NR=1030155A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SANDER THORSTEN</creatorcontrib><creatorcontrib>GROSSER GÖTZ</creatorcontrib><creatorcontrib>SCHNEIDER KLAUS</creatorcontrib><creatorcontrib>HAUSWALD RALF</creatorcontrib><title>MAGNETSYSTEM, SPUTTERVORRICHTUNG UND VERFAHREN</title><description>Gemäß verschiedenen Ausführungsformen kann ein Magnetsystem (100) für eine Sputtervorrichtung (300) aufweisen: ein Gehäuse (406g), welches einen Gehäuseinnenraum (406h) aufweist; einen Magnetträger (102), welcher in dem Gehäuseinnenraum (406h) angeordnet und mittels des Gehäuses (406g), vorzugsweise ortsfest zu diesem, abgestützt ist; eine Entfeuchtungsvorrichtung, welche an den Gehäuseinnenraum (406h) angrenzt oder darin angeordnet ist, zum Trocknen des Gehäuseinnenraums (406h).
Disclosed herein are systems, devices, and methods for a magnet system for a sputtering device. The disclosed magnet system may include a housing having a housing interior. The magnet system may also include a magnet holder disposed in the housing interior and supported by the housing in a preferably stationary manner. The magnet system may also include a dehumidifying device adjacent to or disposed in the housing interior for drying the housing interior.</description><subject>CHEMICAL SURFACE TREATMENT</subject><subject>CHEMISTRY</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</subject><subject>COATING MATERIAL WITH METALLIC MATERIAL</subject><subject>COATING METALLIC MATERIAL</subject><subject>DIFFUSION TREATMENT OF METALLIC MATERIAL</subject><subject>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</subject><subject>METALLURGY</subject><subject>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2023</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNDzdXT3cw0JjgwOcfXVUQgOCA0JcQ0K8w8K8nT2CAn1c1cI9XNRCHMNcnP0CHL142FgTUvMKU7lhdLcDApuriHOHrqpBfnxqcUFicmpeakl8U6uhgbGBoampo6GxkQoAQDelSXG</recordid><startdate>20230726</startdate><enddate>20230726</enddate><creator>SANDER THORSTEN</creator><creator>GROSSER GÖTZ</creator><creator>SCHNEIDER KLAUS</creator><creator>HAUSWALD RALF</creator><scope>EVB</scope></search><sort><creationdate>20230726</creationdate><title>MAGNETSYSTEM, SPUTTERVORRICHTUNG UND VERFAHREN</title><author>SANDER THORSTEN ; GROSSER GÖTZ ; SCHNEIDER KLAUS ; HAUSWALD RALF</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_BE1030155A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>ger</language><creationdate>2023</creationdate><topic>CHEMICAL SURFACE TREATMENT</topic><topic>CHEMISTRY</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL</topic><topic>COATING MATERIAL WITH METALLIC MATERIAL</topic><topic>COATING METALLIC MATERIAL</topic><topic>DIFFUSION TREATMENT OF METALLIC MATERIAL</topic><topic>INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL</topic><topic>METALLURGY</topic><topic>SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION</topic><toplevel>online_resources</toplevel><creatorcontrib>SANDER THORSTEN</creatorcontrib><creatorcontrib>GROSSER GÖTZ</creatorcontrib><creatorcontrib>SCHNEIDER KLAUS</creatorcontrib><creatorcontrib>HAUSWALD RALF</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SANDER THORSTEN</au><au>GROSSER GÖTZ</au><au>SCHNEIDER KLAUS</au><au>HAUSWALD RALF</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MAGNETSYSTEM, SPUTTERVORRICHTUNG UND VERFAHREN</title><date>2023-07-26</date><risdate>2023</risdate><abstract>Gemäß verschiedenen Ausführungsformen kann ein Magnetsystem (100) für eine Sputtervorrichtung (300) aufweisen: ein Gehäuse (406g), welches einen Gehäuseinnenraum (406h) aufweist; einen Magnetträger (102), welcher in dem Gehäuseinnenraum (406h) angeordnet und mittels des Gehäuses (406g), vorzugsweise ortsfest zu diesem, abgestützt ist; eine Entfeuchtungsvorrichtung, welche an den Gehäuseinnenraum (406h) angrenzt oder darin angeordnet ist, zum Trocknen des Gehäuseinnenraums (406h).
Disclosed herein are systems, devices, and methods for a magnet system for a sputtering device. The disclosed magnet system may include a housing having a housing interior. The magnet system may also include a magnet holder disposed in the housing interior and supported by the housing in a preferably stationary manner. The magnet system may also include a dehumidifying device adjacent to or disposed in the housing interior for drying the housing interior.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION |
| title | MAGNETSYSTEM, SPUTTERVORRICHTUNG UND VERFAHREN |
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