Cleaning method and cleaning apparatus

A method and device for cleaning, in which an object to be cleaned is washed or rinsed with cleaning or rinsing agent constituted mainly of non-aqueous solvent and hydrophilic solvent and is dried after removing cleaning or rinsing agent sticking to the surface of said object with the application of...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YASUTAKA IMAJO, MINORU INADA, MASAHIDE UCHINO
Format: Patent
Sprache:eng
Schlagworte:
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