Positive acting photoresist and method of producing same

A positive-acting photoresist composition which produces crosslinked images and processes for using the photoresist composition are disclosed. The photoresist composition is prepared from a mixture containing a film-forming, polymer-containing, acid-hardening resin system, an acid or acid-generating...

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Bibliographische Detailangaben
1. Verfasser: MARK ROBERT WINKLE
Format: Patent
Sprache:eng
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