Excimer laser automatic fluorine control system
An excimer laser system with a real time fluorine monitor and an automatic fluorine control system to permit precise control of the fluorine concentration within the laser chamber. Cleaned laser gas is extracted from the laser chamber and directed through an F2 sample cell prior to returning to the...
Gespeichert in:
| Hauptverfasser: | , , , , , , , , |
|---|---|
| Format: | Patent |
| Sprache: | eng |
| Schlagworte: | |
| Online-Zugang: | Volltext bestellen |
| Tags: |
Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
|
| container_end_page | |
|---|---|
| container_issue | |
| container_start_page | |
| container_title | |
| container_volume | |
| creator | MICHAEL C. BINDER MULJADI TANTRA JASON R. CARLESI PALASH P DAS SHAHRYAR ROKNI MENGXIONG GONG DANIEL G. PATTERSON TOM A WATSON DAVID J. TAMMADGE |
| description | An excimer laser system with a real time fluorine monitor and an automatic fluorine control system to permit precise control of the fluorine concentration within the laser chamber. Cleaned laser gas is extracted from the laser chamber and directed through an F2 sample cell prior to returning to the chamber through one of the chamber window housings. A UV light beam is directed through the F2 sample cell and the amount of absorption of the light is measured. In preferred embodiments the absorption is measured by detecting with a photo detector the amount of light which passes through the cell. The photo detector provides a feedback signal which is used by a laser controller to automatically control fluorine concentration in the chamber to within desired ranges. In another preferred embodiment an acoustic detector detects acoustic signals resulting from absorbed light pulses. This invention provides a substantially real time measurement of fluorine concentration. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_AU2214299A</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>AU2214299A</sourcerecordid><originalsourceid>FETCH-epo_espacenet_AU2214299A3</originalsourceid><addsrcrecordid>eNrjZNB3rUjOzE0tUshJLAaSiaUl-bmJJZnJCmk5pflFmXmpCsn5eSVF-TkKxZXFJam5PAysaYk5xam8UJqbQd7NNcTZQze1ID8-tbggMTk1L7Uk3jHUyMjQxMjS0tGYsAoAuxsqqw</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>Excimer laser automatic fluorine control system</title><source>esp@cenet</source><creator>MICHAEL C. BINDER ; MULJADI TANTRA ; JASON R. CARLESI ; PALASH P DAS ; SHAHRYAR ROKNI ; MENGXIONG GONG ; DANIEL G. PATTERSON ; TOM A WATSON ; DAVID J. TAMMADGE</creator><creatorcontrib>MICHAEL C. BINDER ; MULJADI TANTRA ; JASON R. CARLESI ; PALASH P DAS ; SHAHRYAR ROKNI ; MENGXIONG GONG ; DANIEL G. PATTERSON ; TOM A WATSON ; DAVID J. TAMMADGE</creatorcontrib><description>An excimer laser system with a real time fluorine monitor and an automatic fluorine control system to permit precise control of the fluorine concentration within the laser chamber. Cleaned laser gas is extracted from the laser chamber and directed through an F2 sample cell prior to returning to the chamber through one of the chamber window housings. A UV light beam is directed through the F2 sample cell and the amount of absorption of the light is measured. In preferred embodiments the absorption is measured by detecting with a photo detector the amount of light which passes through the cell. The photo detector provides a feedback signal which is used by a laser controller to automatically control fluorine concentration in the chamber to within desired ranges. In another preferred embodiment an acoustic detector detects acoustic signals resulting from absorbed light pulses. This invention provides a substantially real time measurement of fluorine concentration.</description><edition>6</edition><language>eng</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; BASIC ELECTRIC ELEMENTS ; CINEMATOGRAPHY ; DEVICES USING STIMULATED EMISSION ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MATERIALS THEREFOR ; ORIGINALS THEREFOR ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS</subject><creationdate>1999</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19990816&DB=EPODOC&CC=AU&NR=2214299A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19990816&DB=EPODOC&CC=AU&NR=2214299A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>MICHAEL C. BINDER</creatorcontrib><creatorcontrib>MULJADI TANTRA</creatorcontrib><creatorcontrib>JASON R. CARLESI</creatorcontrib><creatorcontrib>PALASH P DAS</creatorcontrib><creatorcontrib>SHAHRYAR ROKNI</creatorcontrib><creatorcontrib>MENGXIONG GONG</creatorcontrib><creatorcontrib>DANIEL G. PATTERSON</creatorcontrib><creatorcontrib>TOM A WATSON</creatorcontrib><creatorcontrib>DAVID J. TAMMADGE</creatorcontrib><title>Excimer laser automatic fluorine control system</title><description>An excimer laser system with a real time fluorine monitor and an automatic fluorine control system to permit precise control of the fluorine concentration within the laser chamber. Cleaned laser gas is extracted from the laser chamber and directed through an F2 sample cell prior to returning to the chamber through one of the chamber window housings. A UV light beam is directed through the F2 sample cell and the amount of absorption of the light is measured. In preferred embodiments the absorption is measured by detecting with a photo detector the amount of light which passes through the cell. The photo detector provides a feedback signal which is used by a laser controller to automatically control fluorine concentration in the chamber to within desired ranges. In another preferred embodiment an acoustic detector detects acoustic signals resulting from absorbed light pulses. This invention provides a substantially real time measurement of fluorine concentration.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>BASIC ELECTRIC ELEMENTS</subject><subject>CINEMATOGRAPHY</subject><subject>DEVICES USING STIMULATED EMISSION</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MATERIALS THEREFOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1999</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZNB3rUjOzE0tUshJLAaSiaUl-bmJJZnJCmk5pflFmXmpCsn5eSVF-TkKxZXFJam5PAysaYk5xam8UJqbQd7NNcTZQze1ID8-tbggMTk1L7Uk3jHUyMjQxMjS0tGYsAoAuxsqqw</recordid><startdate>19990816</startdate><enddate>19990816</enddate><creator>MICHAEL C. BINDER</creator><creator>MULJADI TANTRA</creator><creator>JASON R. CARLESI</creator><creator>PALASH P DAS</creator><creator>SHAHRYAR ROKNI</creator><creator>MENGXIONG GONG</creator><creator>DANIEL G. PATTERSON</creator><creator>TOM A WATSON</creator><creator>DAVID J. TAMMADGE</creator><scope>EVB</scope></search><sort><creationdate>19990816</creationdate><title>Excimer laser automatic fluorine control system</title><author>MICHAEL C. BINDER ; MULJADI TANTRA ; JASON R. CARLESI ; PALASH P DAS ; SHAHRYAR ROKNI ; MENGXIONG GONG ; DANIEL G. PATTERSON ; TOM A WATSON ; DAVID J. TAMMADGE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_AU2214299A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>1999</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>BASIC ELECTRIC ELEMENTS</topic><topic>CINEMATOGRAPHY</topic><topic>DEVICES USING STIMULATED EMISSION</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MATERIALS THEREFOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><toplevel>online_resources</toplevel><creatorcontrib>MICHAEL C. BINDER</creatorcontrib><creatorcontrib>MULJADI TANTRA</creatorcontrib><creatorcontrib>JASON R. CARLESI</creatorcontrib><creatorcontrib>PALASH P DAS</creatorcontrib><creatorcontrib>SHAHRYAR ROKNI</creatorcontrib><creatorcontrib>MENGXIONG GONG</creatorcontrib><creatorcontrib>DANIEL G. PATTERSON</creatorcontrib><creatorcontrib>TOM A WATSON</creatorcontrib><creatorcontrib>DAVID J. TAMMADGE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>MICHAEL C. BINDER</au><au>MULJADI TANTRA</au><au>JASON R. CARLESI</au><au>PALASH P DAS</au><au>SHAHRYAR ROKNI</au><au>MENGXIONG GONG</au><au>DANIEL G. PATTERSON</au><au>TOM A WATSON</au><au>DAVID J. TAMMADGE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Excimer laser automatic fluorine control system</title><date>1999-08-16</date><risdate>1999</risdate><abstract>An excimer laser system with a real time fluorine monitor and an automatic fluorine control system to permit precise control of the fluorine concentration within the laser chamber. Cleaned laser gas is extracted from the laser chamber and directed through an F2 sample cell prior to returning to the chamber through one of the chamber window housings. A UV light beam is directed through the F2 sample cell and the amount of absorption of the light is measured. In preferred embodiments the absorption is measured by detecting with a photo detector the amount of light which passes through the cell. The photo detector provides a feedback signal which is used by a laser controller to automatically control fluorine concentration in the chamber to within desired ranges. In another preferred embodiment an acoustic detector detects acoustic signals resulting from absorbed light pulses. This invention provides a substantially real time measurement of fluorine concentration.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
| fulltext | fulltext_linktorsrc |
| identifier | |
| ispartof | |
| issn | |
| language | eng |
| recordid | cdi_epo_espacenet_AU2214299A |
| source | esp@cenet |
| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY DEVICES USING STIMULATED EMISSION ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS |
| title | Excimer laser automatic fluorine control system |
| url | https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-26T16%3A01%3A45IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=MICHAEL%20C.%20BINDER&rft.date=1999-08-16&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EAU2214299A%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true |