System level fluidics and controls

A pressure and vacuum pump including at least two diaphragm pump heads for providing vacuum and pressure simultaneously. The dual function pump reduces number of required pumps, is traditionally quieter, and enables the system to run at a lower duty cycle. A drive in the pump housing causes a connec...

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Bibliographische Detailangaben
Hauptverfasser: MEHTA, Deep, NAZARIFAR, Nader, LIN, Justin
Format: Patent
Sprache:eng
Schlagworte:
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