A preparation method of molybdenum target material

This invention relates to a preparation method of molybdenum target material, pertaining to the technical field of sputtering target material preparation. The preparation method of molybdenum target material of the invention comprises the following steps: first, sinter molybdenum materials into moly...

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Bibliographische Detailangaben
Hauptverfasser: Chen, Yanfang, Zhao, Haili, Mao, Aixia, Xie, Jingpei, Chang, Qinghua, Wang, Aiqin, Wang, Wenyan, Ma, Douqin
Format: Patent
Sprache:eng
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