A preparation method of molybdenum target material
This invention relates to a preparation method of molybdenum target material, pertaining to the technical field of sputtering target material preparation. The preparation method of molybdenum target material of the invention comprises the following steps: first, sinter molybdenum materials into moly...
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| creator | Chen, Yanfang Zhao, Haili Mao, Aixia Xie, Jingpei Chang, Qinghua Wang, Aiqin Wang, Wenyan Ma, Douqin |
| description | This invention relates to a preparation method of molybdenum target material, pertaining to the technical field of sputtering target material preparation. The preparation method of molybdenum target material of the invention comprises the following steps: first, sinter molybdenum materials into molybdenum ingots; then, purify by electron beam melting; finally, obtain molybdenum target material by circumferential rolling and vacuum annealing. The method solves problems of high impurity content and uneven texture distribution of molybdenum target materials. Molybdenum target materials prepared by this method have higher purity and intensity, more even texture distribution. They can form specific crystal orientation and acquire better sputtering performance. -1/1 Figure 1 |
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The preparation method of molybdenum target material of the invention comprises the following steps: first, sinter molybdenum materials into molybdenum ingots; then, purify by electron beam melting; finally, obtain molybdenum target material by circumferential rolling and vacuum annealing. The method solves problems of high impurity content and uneven texture distribution of molybdenum target materials. Molybdenum target materials prepared by this method have higher purity and intensity, more even texture distribution. 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They can form specific crystal orientation and acquire better sputtering performance. -1/1 Figure 1</description><subject>CASTING</subject><subject>MAKING METALLIC POWDER</subject><subject>MANUFACTURE OF ARTICLES FROM METALLIC POWDER</subject><subject>PERFORMING OPERATIONS</subject><subject>POWDER METALLURGY</subject><subject>TRANSPORTING</subject><subject>WORKING METALLIC POWDER</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2021</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZDByVCgoSi1ILEosyczPU8hNLcnIT1HIT1PIzc-pTEpJzSvNVShJLEpPLVHITSxJLcpMzOFhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfGOoUYGRgaGBsZmliaOJsbEqQIAfC8s8w</recordid><startdate>20210204</startdate><enddate>20210204</enddate><creator>Chen, Yanfang</creator><creator>Zhao, Haili</creator><creator>Mao, Aixia</creator><creator>Xie, Jingpei</creator><creator>Chang, Qinghua</creator><creator>Wang, Aiqin</creator><creator>Wang, Wenyan</creator><creator>Ma, Douqin</creator><scope>EVB</scope></search><sort><creationdate>20210204</creationdate><title>A preparation method of molybdenum target material</title><author>Chen, Yanfang ; Zhao, Haili ; Mao, Aixia ; Xie, Jingpei ; Chang, Qinghua ; Wang, Aiqin ; Wang, Wenyan ; Ma, Douqin</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_AU2020103694A43</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2021</creationdate><topic>CASTING</topic><topic>MAKING METALLIC POWDER</topic><topic>MANUFACTURE OF ARTICLES FROM METALLIC POWDER</topic><topic>PERFORMING OPERATIONS</topic><topic>POWDER METALLURGY</topic><topic>TRANSPORTING</topic><topic>WORKING METALLIC POWDER</topic><toplevel>online_resources</toplevel><creatorcontrib>Chen, Yanfang</creatorcontrib><creatorcontrib>Zhao, Haili</creatorcontrib><creatorcontrib>Mao, Aixia</creatorcontrib><creatorcontrib>Xie, Jingpei</creatorcontrib><creatorcontrib>Chang, Qinghua</creatorcontrib><creatorcontrib>Wang, Aiqin</creatorcontrib><creatorcontrib>Wang, Wenyan</creatorcontrib><creatorcontrib>Ma, Douqin</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Chen, Yanfang</au><au>Zhao, Haili</au><au>Mao, Aixia</au><au>Xie, Jingpei</au><au>Chang, Qinghua</au><au>Wang, Aiqin</au><au>Wang, Wenyan</au><au>Ma, Douqin</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>A preparation method of molybdenum target material</title><date>2021-02-04</date><risdate>2021</risdate><abstract>This invention relates to a preparation method of molybdenum target material, pertaining to the technical field of sputtering target material preparation. The preparation method of molybdenum target material of the invention comprises the following steps: first, sinter molybdenum materials into molybdenum ingots; then, purify by electron beam melting; finally, obtain molybdenum target material by circumferential rolling and vacuum annealing. The method solves problems of high impurity content and uneven texture distribution of molybdenum target materials. Molybdenum target materials prepared by this method have higher purity and intensity, more even texture distribution. They can form specific crystal orientation and acquire better sputtering performance. -1/1 Figure 1</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CASTING MAKING METALLIC POWDER MANUFACTURE OF ARTICLES FROM METALLIC POWDER PERFORMING OPERATIONS POWDER METALLURGY TRANSPORTING WORKING METALLIC POWDER |
| title | A preparation method of molybdenum target material |
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