Semiconductor plug protected by protective dielectric layer in three-dimensional memory device and method for forming the same

Embodiments of 3D memory devices with a semiconductor plug protected by a dielectric layer and methods for forming the same are disclosed. In an example, a 3D memory device includes a substrate, a memory stack including a plurality of interleaved conductor layers and dielectric layers on the substra...

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Bibliographische Detailangaben

Hauptverfasser:	ZHANG, Fushan, WANG, EnBo, YANG, Haohao, XU, Qianbing, ZHANG, Ruo Fang, ZHANG, Yong
Format:	Patent
Sprache:	eng
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
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