Hydrogen gas recovery system and hydrogen gas separation and recovery method

The amount of supplemental hydrogen, which is used for separating the reactant exhaust of a polycrystalline silicon production apparatus, is reduced as much as possible. Reactant exhaust, in which a chlorosilane and hydrogen chloride have been removed by a hydrogen chloride absorption apparatus (30)...

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Bibliographische Detailangaben
1. Verfasser:	KUROSAWA, YASUSHI
Format:	Patent
Sprache:	eng
Schlagworte:	CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG] CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMPOUNDS THEREOF GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORTING
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