Hydrogen gas recovery system and hydrogen gas separation and recovery method
The amount of supplemental hydrogen, which is used for separating the reactant exhaust of a polycrystalline silicon production apparatus, is reduced as much as possible. Reactant exhaust, in which a chlorosilane and hydrogen chloride have been removed by a hydrogen chloride absorption apparatus (30)...
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| description | The amount of supplemental hydrogen, which is used for separating the reactant exhaust of a polycrystalline silicon production apparatus, is reduced as much as possible. Reactant exhaust, in which a chlorosilane and hydrogen chloride have been removed by a hydrogen chloride absorption apparatus (30), is introduced into an adsorption apparatus (50), and purified hydrogen is recovered (S105). The purified hydrogen is obtained by packing an activated carbon into the adsorption apparatus (50) and, while a gas consisting mainly of hydrogen is passed through said layer of packed activated carbon, removing the unseparated chlorosilane and hydrogen chloride, as well as nitrogen, carbon monoxide, methane, and monosilane, which are comprised within the gas, from said gas by means of adsorption to the activated carbon. Though the nitrogen, carbon monoxide, methane, and monosilane are compressed gas in an adsorbed state, the hydrogen chloride and chlorosilane are liquid in an adsorbed state and thus require application of the heat of vaporization during desorption. Using this feature, the separation of hydrogen chloride and chlorosilane from other impurities is possible merely by separating the pathways of the desorption gas. |
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Reactant exhaust, in which a chlorosilane and hydrogen chloride have been removed by a hydrogen chloride absorption apparatus (30), is introduced into an adsorption apparatus (50), and purified hydrogen is recovered (S105). The purified hydrogen is obtained by packing an activated carbon into the adsorption apparatus (50) and, while a gas consisting mainly of hydrogen is passed through said layer of packed activated carbon, removing the unseparated chlorosilane and hydrogen chloride, as well as nitrogen, carbon monoxide, methane, and monosilane, which are comprised within the gas, from said gas by means of adsorption to the activated carbon. Though the nitrogen, carbon monoxide, methane, and monosilane are compressed gas in an adsorbed state, the hydrogen chloride and chlorosilane are liquid in an adsorbed state and thus require application of the heat of vaporization during desorption. Using this feature, the separation of hydrogen chloride and chlorosilane from other impurities is possible merely by separating the pathways of the desorption gas.</description><language>eng</language><subject>CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG] ; CHEMISTRY ; CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS ; COMPOUNDS THEREOF ; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC ; GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS ; INORGANIC CHEMISTRY ; METALLURGY ; NON-METALLIC ELEMENTS ; PERFORMING OPERATIONS ; PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL ; SEPARATION ; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS ; TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE ; TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE ; TRANSPORTING</subject><creationdate>2012</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20120517&DB=EPODOC&CC=AU&NR=2010307920A1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,777,882,25545,76296</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20120517&DB=EPODOC&CC=AU&NR=2010307920A1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KUROSAWA, YASUSHI</creatorcontrib><title>Hydrogen gas recovery system and hydrogen gas separation and recovery method</title><description>The amount of supplemental hydrogen, which is used for separating the reactant exhaust of a polycrystalline silicon production apparatus, is reduced as much as possible. Reactant exhaust, in which a chlorosilane and hydrogen chloride have been removed by a hydrogen chloride absorption apparatus (30), is introduced into an adsorption apparatus (50), and purified hydrogen is recovered (S105). The purified hydrogen is obtained by packing an activated carbon into the adsorption apparatus (50) and, while a gas consisting mainly of hydrogen is passed through said layer of packed activated carbon, removing the unseparated chlorosilane and hydrogen chloride, as well as nitrogen, carbon monoxide, methane, and monosilane, which are comprised within the gas, from said gas by means of adsorption to the activated carbon. Though the nitrogen, carbon monoxide, methane, and monosilane are compressed gas in an adsorbed state, the hydrogen chloride and chlorosilane are liquid in an adsorbed state and thus require application of the heat of vaporization during desorption. Using this feature, the separation of hydrogen chloride and chlorosilane from other impurities is possible merely by separating the pathways of the desorption gas.</description><subject>CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG]</subject><subject>CHEMISTRY</subject><subject>CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS</subject><subject>COMPOUNDS THEREOF</subject><subject>GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC</subject><subject>GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS</subject><subject>INORGANIC CHEMISTRY</subject><subject>METALLURGY</subject><subject>NON-METALLIC ELEMENTS</subject><subject>PERFORMING OPERATIONS</subject><subject>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</subject><subject>SEPARATION</subject><subject>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS</subject><subject>TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE</subject><subject>TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2012</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZPDxqEwpyk9PzVNITyxWKEpNzi9LLapUKK4sLknNVUjMS1HIQFZQnFqQWJRYkpmfB5aDq89NLcnIT-FhYE1LzClO5YXS3AzKbq4hzh66qQX58anFBYnJqXmpJfGOoUYGhgbGBuaWRgaOhsbEqQIAmwc26Q</recordid><startdate>20120517</startdate><enddate>20120517</enddate><creator>KUROSAWA, YASUSHI</creator><scope>EVB</scope></search><sort><creationdate>20120517</creationdate><title>Hydrogen gas recovery system and hydrogen gas separation and recovery method</title><author>KUROSAWA, YASUSHI</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_AU2010307920A13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2012</creationdate><topic>CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG]</topic><topic>CHEMISTRY</topic><topic>CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS</topic><topic>COMPOUNDS THEREOF</topic><topic>GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC</topic><topic>GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS</topic><topic>INORGANIC CHEMISTRY</topic><topic>METALLURGY</topic><topic>NON-METALLIC ELEMENTS</topic><topic>PERFORMING OPERATIONS</topic><topic>PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL</topic><topic>SEPARATION</topic><topic>TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS</topic><topic>TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE</topic><topic>TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>KUROSAWA, YASUSHI</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KUROSAWA, YASUSHI</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>Hydrogen gas recovery system and hydrogen gas separation and recovery method</title><date>2012-05-17</date><risdate>2012</risdate><abstract>The amount of supplemental hydrogen, which is used for separating the reactant exhaust of a polycrystalline silicon production apparatus, is reduced as much as possible. Reactant exhaust, in which a chlorosilane and hydrogen chloride have been removed by a hydrogen chloride absorption apparatus (30), is introduced into an adsorption apparatus (50), and purified hydrogen is recovered (S105). The purified hydrogen is obtained by packing an activated carbon into the adsorption apparatus (50) and, while a gas consisting mainly of hydrogen is passed through said layer of packed activated carbon, removing the unseparated chlorosilane and hydrogen chloride, as well as nitrogen, carbon monoxide, methane, and monosilane, which are comprised within the gas, from said gas by means of adsorption to the activated carbon. Though the nitrogen, carbon monoxide, methane, and monosilane are compressed gas in an adsorbed state, the hydrogen chloride and chlorosilane are liquid in an adsorbed state and thus require application of the heat of vaporization during desorption. Using this feature, the separation of hydrogen chloride and chlorosilane from other impurities is possible merely by separating the pathways of the desorption gas.</abstract><oa>free_for_read</oa></addata></record> |
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| subjects | CAPTURE, STORAGE, SEQUESTRATION OR DISPOSAL OF GREENHOUSEGASES [GHG] CHEMISTRY CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION ORPROCESSING OF GOODS COMPOUNDS THEREOF GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL SEPARATION TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINSTCLIMATE CHANGE TRANSPORTING |
| title | Hydrogen gas recovery system and hydrogen gas separation and recovery method |
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