A configurable micromechanical diffractive element with anti stiction bumps

A configurable micromechanical diffractive element with anti stiction bumps

The invention relates to a micromechanical unit, in particular, an adjustable optical filter, and also a method to manufacture the unit. The unit comprises a first device layer and a second substrate layer at least partially fastened to each other, where the device layer comprises a number of reflec...

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Hauptverfasser: SAGBERG, HAKON, ROGNE, HENRIK, BAKKE, THOR, LACOLLE, MATTHIEU, MOE, SIGURD TEODOR, JOHANSEN, IB-RUNE, WANG, DAG TORSTEIN
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Sprache:eng
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MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
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creator SAGBERG, HAKON
ROGNE, HENRIK
BAKKE, THOR
LACOLLE, MATTHIEU
MOE, SIGURD TEODOR
JOHANSEN, IB-RUNE
WANG, DAG TORSTEIN
description The invention relates to a micromechanical unit, in particular, an adjustable optical filter, and also a method to manufacture the unit. The unit comprises a first device layer and a second substrate layer at least partially fastened to each other, where the device layer comprises a number of reflecting elements divided between a number of non movable, fixed reflecting elements, where the fixed elements are connected with the substrate, and where a cavity is defined between the substrate and each movable element and each movable element is set up to produce a spring-loaded movement into the cavity, and where a number of dielectric spacer blocks are placed in the cavities between each movable element and the substrate to avoid electric contact between them.
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subjects MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICALDEVICES
MICROSTRUCTURAL TECHNOLOGY
PERFORMING OPERATIONS
TRANSPORTING
title A configurable micromechanical diffractive element with anti stiction bumps
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