Method and system for coupling waveguides

A method for photonically coupling to at least one active photonic device structure formed on a substrate, the method including: etching the active device structure with a high selectivity towards a crystallographic plane to form a sloped terminice with respect to the substrate; and, depositing at l...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	LOU DIMARCO, LIYOU YANG, HOOMAN MOHSENI, NAGENDRANATH MALEY, JOSEPH ABELES, RALPH WHALEY, DAVID CAPEWELL, MARTIN KWAKERNAAK
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS SEMICONDUCTOR DEVICES
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