ELEKTRONENSTRAHL-BELICHTUNGSVORRICHTUNG

An electron beam exposure system of a variable shaped electron beam type in which an input pattern of any geometrical shape is decomposed into rectangular patterns of a given size, whereby the pattern is exposed by an electron beam having a cross-section corresponding to the decomposed rectangular p...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FUJINAMI, MINPEI, SHIBAYAMA, AKINORI, YODA, HARUO
Format:	Patent
Sprache:	eng ; ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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