MIKROMECHANISCHES BAUELEMENT UND VERFAHREN ZUR SCHWINGUNGSANREGUNG EINES SCHWINGUNGSELEMENTS EINES MIKROMECHANISCHEN BAUELEMENTS

MIKROMECHANISCHES BAUELEMENT UND VERFAHREN ZUR SCHWINGUNGSANREGUNG EINES SCHWINGUNGSELEMENTS EINES MIKROMECHANISCHEN BAUELEMENTS

A micromechanical component and a method for providing the oscillation excitation of an oscillation element of a micromechanical component, the micromechanical component having a frame, which is connected to a carrier substrate by an outer suspension element, in which the frame being tiltable about...

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description A micromechanical component and a method for providing the oscillation excitation of an oscillation element of a micromechanical component, the micromechanical component having a frame, which is connected to a carrier substrate by an outer suspension element, in which the frame being tiltable about a first axis and oscillatory about a second axis that is positioned perpendicular to the first axis, and in which the micromechanical component having an oscillation element that is connected to the frame by an inner suspension element, and is tiltable about the second axis, the outer suspension element being provided to be dimensioned in such a way that a first oscillation of the frame about the second axis and a second oscillation of the oscillation element about the second axis have a maximum coupling.
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fullrecord <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_ATE548674TT1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>ATE548674TT1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_ATE548674TT13</originalsourceid><addsrcrecordid>eNrjZGjw9fQO8vd1dfZw9PMMdvZwDVZwcgx19XH1dfULUQj1c1EIcw1yc_QIcvVTiAoNUgAqCff0cw_1cw929AtyBTEUXD39gNqQZKDag6Ey6Fb4IVkRzMPAmpaYU5zKC6W5GRTdXEOcPXRTC_LjU4sLEpNT81JL4h1DXE1NLMzMTUJCDI2JUQMALvY9_g</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>MIKROMECHANISCHES BAUELEMENT UND VERFAHREN ZUR SCHWINGUNGSANREGUNG EINES SCHWINGUNGSELEMENTS EINES MIKROMECHANISCHEN BAUELEMENTS</title><source>esp@cenet</source><creator>SATTLER, ROBERT</creator><creatorcontrib>SATTLER, ROBERT</creatorcontrib><description>A micromechanical component and a method for providing the oscillation excitation of an oscillation element of a micromechanical component, the micromechanical component having a frame, which is connected to a carrier substrate by an outer suspension element, in which the frame being tiltable about a first axis and oscillatory about a second axis that is positioned perpendicular to the first axis, and in which the micromechanical component having an oscillation element that is connected to the frame by an inner suspension element, and is tiltable about the second axis, the outer suspension element being provided to be dimensioned in such a way that a first oscillation of the frame about the second axis and a second oscillation of the oscillation element about the second axis have a maximum coupling.</description><language>ger</language><creationdate>2012</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20120315&amp;DB=EPODOC&amp;CC=AT&amp;NR=E548674T1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&amp;date=20120315&amp;DB=EPODOC&amp;CC=AT&amp;NR=E548674T1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>SATTLER, ROBERT</creatorcontrib><title>MIKROMECHANISCHES BAUELEMENT UND VERFAHREN ZUR SCHWINGUNGSANREGUNG EINES SCHWINGUNGSELEMENTS EINES MIKROMECHANISCHEN BAUELEMENTS</title><description>A micromechanical component and a method for providing the oscillation excitation of an oscillation element of a micromechanical component, the micromechanical component having a frame, which is connected to a carrier substrate by an outer suspension element, in which the frame being tiltable about a first axis and oscillatory about a second axis that is positioned perpendicular to the first axis, and in which the micromechanical component having an oscillation element that is connected to the frame by an inner suspension element, and is tiltable about the second axis, the outer suspension element being provided to be dimensioned in such a way that a first oscillation of the frame about the second axis and a second oscillation of the oscillation element about the second axis have a maximum coupling.</description><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2012</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZGjw9fQO8vd1dfZw9PMMdvZwDVZwcgx19XH1dfULUQj1c1EIcw1yc_QIcvVTiAoNUgAqCff0cw_1cw929AtyBTEUXD39gNqQZKDag6Ey6Fb4IVkRzMPAmpaYU5zKC6W5GRTdXEOcPXRTC_LjU4sLEpNT81JL4h1DXE1NLMzMTUJCDI2JUQMALvY9_g</recordid><startdate>20120315</startdate><enddate>20120315</enddate><creator>SATTLER, ROBERT</creator><scope>EVB</scope></search><sort><creationdate>20120315</creationdate><title>MIKROMECHANISCHES BAUELEMENT UND VERFAHREN ZUR SCHWINGUNGSANREGUNG EINES SCHWINGUNGSELEMENTS EINES MIKROMECHANISCHEN BAUELEMENTS</title><author>SATTLER, ROBERT</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_ATE548674TT13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>ger</language><creationdate>2012</creationdate><toplevel>online_resources</toplevel><creatorcontrib>SATTLER, ROBERT</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>SATTLER, ROBERT</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>MIKROMECHANISCHES BAUELEMENT UND VERFAHREN ZUR SCHWINGUNGSANREGUNG EINES SCHWINGUNGSELEMENTS EINES MIKROMECHANISCHEN BAUELEMENTS</title><date>2012-03-15</date><risdate>2012</risdate><abstract>A micromechanical component and a method for providing the oscillation excitation of an oscillation element of a micromechanical component, the micromechanical component having a frame, which is connected to a carrier substrate by an outer suspension element, in which the frame being tiltable about a first axis and oscillatory about a second axis that is positioned perpendicular to the first axis, and in which the micromechanical component having an oscillation element that is connected to the frame by an inner suspension element, and is tiltable about the second axis, the outer suspension element being provided to be dimensioned in such a way that a first oscillation of the frame about the second axis and a second oscillation of the oscillation element about the second axis have a maximum coupling.</abstract><oa>free_for_read</oa></addata></record>
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title MIKROMECHANISCHES BAUELEMENT UND VERFAHREN ZUR SCHWINGUNGSANREGUNG EINES SCHWINGUNGSELEMENTS EINES MIKROMECHANISCHEN BAUELEMENTS
url https://sfx.bib-bvb.de/sfx_tum?ctx_ver=Z39.88-2004&ctx_enc=info:ofi/enc:UTF-8&ctx_tim=2024-12-18T23%3A06%3A57IST&url_ver=Z39.88-2004&url_ctx_fmt=infofi/fmt:kev:mtx:ctx&rfr_id=info:sid/primo.exlibrisgroup.com:primo3-Article-epo_EVB&rft_val_fmt=info:ofi/fmt:kev:mtx:patent&rft.genre=patent&rft.au=SATTLER,%20ROBERT&rft.date=2012-03-15&rft_id=info:doi/&rft_dat=%3Cepo_EVB%3EATE548674TT1%3C/epo_EVB%3E%3Curl%3E%3C/url%3E&disable_directlink=true&sfx.directlink=off&sfx.report_link=0&rft_id=info:oai/&rft_id=info:pmid/&rfr_iscdi=true