SCHEIBCHENBEHÄLTER MIT RADIAL SCHWENKENDEN VERRIEGELUNGSELEMENTEN

The semiconductor wafer containment device or wafer box includes a base with a planar floor and a double concentric cylindrical wall structure arising therefrom. The double concentric cylindrical wall structure includes slots through which latch elements pivot radially. The latch elements include an...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	FORSYTH, VALORIS, BROWN, BERRY, GARDINER, JIM
Format:	Patent
Sprache:	ger
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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