REAKTOR UND VERFAHREN ZUR HERSTELLUNG VON SILIZIUM

REAKTOR UND VERFAHREN ZUR HERSTELLUNG VON SILIZIUM

In a reactor for the decomposition of a silicon-containing gas, provision is made, to avoid silicon deposition on an inner wall of a reactor vessel, for at least one catalytically active mesh to be provided within a reaction chamber between at least one gas feed line and the inner wall (4). The mesh...

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Hauptverfasser: MUELLER, ARMIN, SINGLIAR, UTE, SONNENSCHEIN, RAYMUND, SILL, TORSTEN, PAETZOLD, CARSTEN, BERTHOLD, RICO, BEYER, CHRISTIAN, ZIEGENBALG, GERALD
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creator MUELLER, ARMIN
SINGLIAR, UTE
SONNENSCHEIN, RAYMUND
SILL, TORSTEN
PAETZOLD, CARSTEN
BERTHOLD, RICO
BEYER, CHRISTIAN
ZIEGENBALG, GERALD
description In a reactor for the decomposition of a silicon-containing gas, provision is made, to avoid silicon deposition on an inner wall of a reactor vessel, for at least one catalytically active mesh to be provided within a reaction chamber between at least one gas feed line and the inner wall (4). The mesh accelerates the thermal decomposition of the gas and reduces the deposition of silicon on the inner wall. Also described is a process for the preparation of silicon using the reactor according to the invention and the use in photovoltaics of the silicon prepared.
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title REAKTOR UND VERFAHREN ZUR HERSTELLUNG VON SILIZIUM
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