SENSOREINHEIT, VORRICHTUNG UND VERFAHREN ZUR INSPEKTION DER OBERFLÄCHE EINES OBJEKTES

A sensor unit (50), a device, and a process for inspection of a surface (10', 10DELTA) of an object (10) for the purpose of identifying surface characteristics, such as structural defects. The device contains an emitting module (51) and a receiving module (52). The emitting module emits at leas...

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Hauptverfasser:	WOLLMANN, CHRISTIAN, WENERT, LUTZ, IHLEFELD, JOACHIM, GRIESER, RALF
Format:	Patent
Sprache:	ger
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
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creator	WOLLMANN, CHRISTIAN WENERT, LUTZ IHLEFELD, JOACHIM GRIESER, RALF
description	A sensor unit (50), a device, and a process for inspection of a surface (10', 10DELTA) of an object (10) for the purpose of identifying surface characteristics, such as structural defects. The device contains an emitting module (51) and a receiving module (52). The emitting module emits at least one beam bundle (6, 6', 6''). The receiving module has at least one light receiver (15, 16, 20). A rotating polygonal mirror wheel (2) is located in the focal point of a parabolic mirror (1). A beam bundle (6) of the laser (3, 4) is directed onto the mirror (1) by means of a telecentric lens, which guides the emitter and receiver beam on the same optical axis, whereby the parabolic mirror (1) guides the deflected beam bundle (6, 6', 6'') under a constant angle relative to the axis of symmetry (7) of the parabolic mirror (1) along a scanning line (23, 24) over the object (10). The diffusely reflected beam bundle, after being deflected out of the common beam path, impinges on the processing unit (5).
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subjects	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS OPTICAL ELEMENTS, SYSTEMS, OR APPARATUS OPTICS PHYSICS TESTING
title	SENSOREINHEIT, VORRICHTUNG UND VERFAHREN ZUR INSPEKTION DER OBERFLÄCHE EINES OBJEKTES
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