GEOMETRIE UND GESTALTUNGEN EINES GERÄTS ZUM MAGNETRONZERSTÄUBEN

The disclosures relates to a thin film coating system (10) incorporates separate, separately-controlled deposition and reaction zones for depositing materials such as refractory metals and forming oxides and other compounds and alloys of such materials. The associated process involves rotating or tr...

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Hauptverfasser:	SOBERANIS, DAVID L, DICKEY, ERIK R, ALLEN, THOMAS H, TEMPLE, MICHAEL D, SEESER, JAMES W, ILLSLEY, ROLF F, SEDDON, RICHARD I, LEFEBVRE, PAUL M, HICHWA, BRYANT P, SCOBEY, MICHAEL A, KLINGER, ROBERT F, WENTHWORTH, PATRICK R, VAN HORN, CRAIG C
Format:	Patent
Sprache:	ger
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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