POSITIONIERVORRICHTUNG
A positioning device comprising first and second supports (9,11) which are interconnected by a parallelogram mechanism of elastically deflexible rods (17), the first and second supports (9,11) together being displaceable in horizontal planes with a maintained position of the first support (9) in the...
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| creator | BOUWER, ADRIANUS G |
| description | A positioning device comprising first and second supports (9,11) which are interconnected by a parallelogram mechanism of elastically deflexible rods (17), the first and second supports (9,11) together being displaceable in horizontal planes with a maintained position of the first support (9) in the vertical direction, while with a maintained position of the first support (9) in a horizontal plane this support (9) is displaceable in the vertical direction by means of a substantially frictionless relative displacement of the second support (11) with respect to the first support (9) in the horizontal direction. The positioning device is particularly suitable for displacements of an object in the sub-micron range, such as, for example, in optical lithographic devices. |
| format | Patent |
| fullrecord | <record><control><sourceid>epo_EVB</sourceid><recordid>TN_cdi_epo_espacenet_ATE127940TT1</recordid><sourceformat>XML</sourceformat><sourcesystem>PC</sourcesystem><sourcerecordid>ATE127940TT1</sourcerecordid><originalsourceid>FETCH-epo_espacenet_ATE127940TT13</originalsourceid><addsrcrecordid>eNrjZBAL8A_2DPH09_N0DQrzDwrydPYICfVz52FgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8Y4hroZG5pYmBiEhhsbEqAEA-J0gPQ</addsrcrecordid><sourcetype>Open Access Repository</sourcetype><iscdi>true</iscdi><recordtype>patent</recordtype></control><display><type>patent</type><title>POSITIONIERVORRICHTUNG</title><source>esp@cenet</source><creator>BOUWER, ADRIANUS G</creator><creatorcontrib>BOUWER, ADRIANUS G</creatorcontrib><description>A positioning device comprising first and second supports (9,11) which are interconnected by a parallelogram mechanism of elastically deflexible rods (17), the first and second supports (9,11) together being displaceable in horizontal planes with a maintained position of the first support (9) in the vertical direction, while with a maintained position of the first support (9) in a horizontal plane this support (9) is displaceable in the vertical direction by means of a substantially frictionless relative displacement of the second support (11) with respect to the first support (9) in the horizontal direction. The positioning device is particularly suitable for displacements of an object in the sub-micron range, such as, for example, in optical lithographic devices.</description><edition>6</edition><language>ger</language><subject>APPARATUS SPECIALLY ADAPTED THEREFOR ; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS ; CINEMATOGRAPHY ; COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT ; CONTROLLING ; DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ; ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; ELECTROGRAPHY ; HOLOGRAPHY ; MACHINE TOOLS ; MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS ; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS ; MATERIALS THEREFOR ; METAL-WORKING NOT OTHERWISE PROVIDED FOR ; ORIGINALS THEREFOR ; PERFORMING OPERATIONS ; PHOTOGRAPHY ; PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES ; PHYSICS ; PRINTED CIRCUITS ; REGULATING ; SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES ; TRANSPORTING</subject><creationdate>1995</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19950915&DB=EPODOC&CC=AT&NR=E127940T1$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,780,885,25564,76547</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=19950915&DB=EPODOC&CC=AT&NR=E127940T1$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>BOUWER, ADRIANUS G</creatorcontrib><title>POSITIONIERVORRICHTUNG</title><description>A positioning device comprising first and second supports (9,11) which are interconnected by a parallelogram mechanism of elastically deflexible rods (17), the first and second supports (9,11) together being displaceable in horizontal planes with a maintained position of the first support (9) in the vertical direction, while with a maintained position of the first support (9) in a horizontal plane this support (9) is displaceable in the vertical direction by means of a substantially frictionless relative displacement of the second support (11) with respect to the first support (9) in the horizontal direction. The positioning device is particularly suitable for displacements of an object in the sub-micron range, such as, for example, in optical lithographic devices.</description><subject>APPARATUS SPECIALLY ADAPTED THEREFOR</subject><subject>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</subject><subject>CINEMATOGRAPHY</subject><subject>COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT</subject><subject>CONTROLLING</subject><subject>DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING</subject><subject>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>ELECTROGRAPHY</subject><subject>HOLOGRAPHY</subject><subject>MACHINE TOOLS</subject><subject>MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS</subject><subject>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</subject><subject>MATERIALS THEREFOR</subject><subject>METAL-WORKING NOT OTHERWISE PROVIDED FOR</subject><subject>ORIGINALS THEREFOR</subject><subject>PERFORMING OPERATIONS</subject><subject>PHOTOGRAPHY</subject><subject>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</subject><subject>PHYSICS</subject><subject>PRINTED CIRCUITS</subject><subject>REGULATING</subject><subject>SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES</subject><subject>TRANSPORTING</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>1995</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZBAL8A_2DPH09_N0DQrzDwrydPYICfVz52FgTUvMKU7lhdLcDIpuriHOHrqpBfnxqcUFicmpeakl8Y4hroZG5pYmBiEhhsbEqAEA-J0gPQ</recordid><startdate>19950915</startdate><enddate>19950915</enddate><creator>BOUWER, ADRIANUS G</creator><scope>EVB</scope></search><sort><creationdate>19950915</creationdate><title>POSITIONIERVORRICHTUNG</title><author>BOUWER, ADRIANUS G</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_ATE127940TT13</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>ger</language><creationdate>1995</creationdate><topic>APPARATUS SPECIALLY ADAPTED THEREFOR</topic><topic>CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS</topic><topic>CINEMATOGRAPHY</topic><topic>COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT</topic><topic>CONTROLLING</topic><topic>DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING</topic><topic>ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>ELECTROGRAPHY</topic><topic>HOLOGRAPHY</topic><topic>MACHINE TOOLS</topic><topic>MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS</topic><topic>MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS</topic><topic>MATERIALS THEREFOR</topic><topic>METAL-WORKING NOT OTHERWISE PROVIDED FOR</topic><topic>ORIGINALS THEREFOR</topic><topic>PERFORMING OPERATIONS</topic><topic>PHOTOGRAPHY</topic><topic>PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES</topic><topic>PHYSICS</topic><topic>PRINTED CIRCUITS</topic><topic>REGULATING</topic><topic>SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES</topic><topic>TRANSPORTING</topic><toplevel>online_resources</toplevel><creatorcontrib>BOUWER, ADRIANUS G</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>BOUWER, ADRIANUS G</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>POSITIONIERVORRICHTUNG</title><date>1995-09-15</date><risdate>1995</risdate><abstract>A positioning device comprising first and second supports (9,11) which are interconnected by a parallelogram mechanism of elastically deflexible rods (17), the first and second supports (9,11) together being displaceable in horizontal planes with a maintained position of the first support (9) in the vertical direction, while with a maintained position of the first support (9) in a horizontal plane this support (9) is displaceable in the vertical direction by means of a substantially frictionless relative displacement of the second support (11) with respect to the first support (9) in the horizontal direction. The positioning device is particularly suitable for displacements of an object in the sub-micron range, such as, for example, in optical lithographic devices.</abstract><edition>6</edition><oa>free_for_read</oa></addata></record> |
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| subjects | APPARATUS SPECIALLY ADAPTED THEREFOR CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CINEMATOGRAPHY COMBINATIONS OR ASSOCIATIONS OF METAL-WORKING MACHINES, NOTDIRECTED TO A PARTICULAR RESULT CONTROLLING DETAILS, COMPONENTS, OR ACCESSORIES FOR MACHINE TOOLS, e.g.ARRANGEMENTS FOR COPYING OR CONTROLLING ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MACHINE TOOLS MACHINE TOOLS IN GENERAL CHARACTERISED BY THE CONSTRUCTION OFPARTICULAR DETAILS OR COMPONENTS MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS MATERIALS THEREFOR METAL-WORKING NOT OTHERWISE PROVIDED FOR ORIGINALS THEREFOR PERFORMING OPERATIONS PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS PRINTED CIRCUITS REGULATING SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES TRANSPORTING |
| title | POSITIONIERVORRICHTUNG |
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