ALKALIMETALL- ODER ERDALKALIMETALL- VERDAMPFERQUELLE

Vaporizing source for gas phase generation comprising an alkali and/or alkali earth metal and a device containing the source. The source contains a Bi alloy and at least one alkali or alkali earth metal. The alloy can contain Na, K, Rb or Cs. An independent claim is included for a device containing...

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Bibliographische Detailangaben
Hauptverfasser: SCHEBESTA SEBASTIAN DR, DENG FLORIAN, GROSSINGER ARTUR, OGRIS ERHARD DR
Format: Patent
Sprache:ger
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Beschreibung
Zusammenfassung:Vaporizing source for gas phase generation comprising an alkali and/or alkali earth metal and a device containing the source. The source contains a Bi alloy and at least one alkali or alkali earth metal. The alloy can contain Na, K, Rb or Cs. An independent claim is included for a device containing the source.