Modeling and Formulation of a Novel Microoptoelectromechanical Gyroscope

This paper proposed a novel design of microgyroscope based on MEMS structures and optic interferometric microdisplacement measurement technique. The gyroscope consists of microvibrator and interferometric readout. Using Coriolis force, the vibrator transfers the system rotation into a forced vibration; the induced vibration can be sensed by the interferometric microdisplacement measurement system. The optic measurement system has two mirrors which will reflect two rays into a detector. The comprehensive studies on the formulation and analysis of the proposed gyroscope have been undertaken; two key sensor equations have been derived in the first time in the world: (1) relation between rotation and phase shift of light Δφ=(4πl0/λ)+(8π/λ)(xmax⁡Qy/ωy)Ω(t)sin⁡(ωdt), (2) relation between rotation and interferometric intensity of light I(t)≈(8π/λ)(xmax⁡Qy/ωy)Ω(t)sin⁡(ωdt)sin⁡(4πl0/λ). The comparison of the proposed gyroscope and well-know Sagnac formulation has been investigated; it shown that the proposed model is much better than Sagnac ones. The new model has finally get rid of needing very long fiber in the case of Sagnac gyroscope. The innovative model gives a new hope to fabricate high accurate and cheaper gyroscope. To date, the proposed gyroscope is the most accurate gyroscope.