Versatile Nanodeposition of Dielectrics and Metals by Non-Contact Direct-Write Technology

Direct-write techniques allow processing in the nanometer range and have become powerful methods for rapid prototyping of microelectronic circuits and micro-electro-mechanical systems (MEMS). Chemical reactions are initiated by a focused beam leading to deposition of solid material on literally any...

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Bibliographische Detailangaben
Hauptverfasser:	Wanzenboeck, H D, Langfischer, H, Harasek, S, Basnar, B, Hutter, H
Format:	Report
Sprache:	eng
Schlagworte:	AUSTRIA CHEMICAL COMPOSITION COMMERCIAL EQUIPMENT COMPONENT REPORT DIELECTRICS DIRECT WRITE TECHNIQUE ELECTROMAGNETIC PROPERTIES FABRICATION Fabrication Metallurgy FOREIGN REPORTS ION BEAMS METALS MICROCIRCUITS MICROELECTROMECHANICAL SYSTEMS MORPHOLOGY NANODEPOSITION NANOTECHNOLOGY NONCONTACT Printing and Graphic Arts RAPID PROTOTYPING SEMICONDUCTOR DEVICES SILICON COMPOUNDS SURFACE PROPERTIES SYMPOSIA TUNGSTEN
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