The Structure and Dielectric Properties of Plasma-Polymerized Benzene and OFCB Thin Films (Preprint)

Polymeric dielectric and photonic thin films can be fabricated using plasma enhanced chemical vapor deposition (PECVD), a room temperature, solvent-free and versatile technique. Many organic precursors have been deposited yielding plasma polymerized thin films with a wide range of functionalities. T...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	Jiang, Hao, Hong, Lianggou, Venkatasubramanian, N, Grant, John T, Eyink, Kurt, Wiacek, Kevin, Fries-Carr, Sandra, Enlow, Jesse, Bunning, Timothy J
Format:	Report
Sprache:	eng
Schlagworte:	BENZENE CHEMICAL VAPOR DEPOSITION COATINGS CROSSLINKING(CHEMISTRY) DIELECTRIC PROPERTIES Electricity and Magnetism ENERGY BANDS ENERGY GAPS FILTERS Industrial Chemistry and Chemical Processing INTEGRATED OPTICS OFCB(OCTAFLUOROCYCLOBUTANE) OPTICAL PROPERTIES Optics PE62102F PECVD(PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION) POLYMERIZATION PRECURSORS PZ(PLASMA ZONE) ROOM TEMPERATURE THICKNESS THIN FILMS WAVEGUIDES WUAFRLM08R1000
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Schreiben Sie den ersten Kommentar!