Research in Mechanics of MEMS Devices

The objectives of the program are to investigate the validity of current solid mechanics principles for MEMS devices and to develop innovative experimental techniques for determining mechanical properties for MEMS elements. The task performed in FY98 was the study of Raman frequency shift of single-...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Chang, D J, Amimoto, S T, Birkitt, A D
Format:	Report
Sprache:	eng
Schlagworte:	Atomic and Molecular Physics and Spectroscopy FREQUENCY SHIFT MECHANICAL PROPERTIES MICROELECTROMECHANICAL SYSTEMS Non-electrical Energy Conversion RAMAN SPECTROSCOPY SINGLE CRYSTALS STRESSES
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!