Research in Mechanics of MEMS Devices

Research in Mechanics of MEMS Devices

The objectives of the program are to investigate the validity of current solid mechanics principles for MEMS devices and to develop innovative experimental techniques for determining mechanical properties for MEMS elements. The task performed in FY98 was the study of Raman frequency shift of single-...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: Chang, D J, Amimoto, S T, Birkitt, A D
Format: Report
Sprache:eng
Schlagworte:
Atomic and Molecular Physics and Spectroscopy
FREQUENCY SHIFT
MECHANICAL PROPERTIES
MICROELECTROMECHANICAL SYSTEMS
Non-electrical Energy Conversion
RAMAN SPECTROSCOPY
SINGLE CRYSTALS
STRESSES
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Beschreibung
Zusammenfassung:The objectives of the program are to investigate the validity of current solid mechanics principles for MEMS devices and to develop innovative experimental techniques for determining mechanical properties for MEMS elements. The task performed in FY98 was the study of Raman frequency shift of single-crystal silicon material under stresses using Raman spectroscopy. The study results, including development of the Eigenvalue equation for calculating the Raman frequency shift, experimental measurements on Raman frequencies for single-crystal silicon, and associated analyses, are presented in this report.