A Nano-Modulated Ceramic Coating Deposition System

This report outlines the design, construction, and implementation of a Nano-modulated ceramic coating deposition system. The deposition system was designed to deposit multilayer (superlattice) coatings of two or more oxide or other non-conducting materials. The system has two cathodes opposed to each other with their magnetic fields forming a closed loop, which enhances the current into the substrate. The deposition system takes advantage of the latest developments in vacuum and characterization technologies to ensure a repeatable process. It is equipped with cryopumps on the main chamber and the load lock for fast pumpdown and minimization of system contamination. Peripheral equipment includes an rf plasma probe for determination in real time of the plasma impedance, and an in-situ ellipsometer for real time characterization of one of the films making up the superlattice.