Evaluation of the Wafer-Level Voltage Ramp Test for Oxide Integrity

This report has two objectives. First, it provides both an overview and a critique of the Joint Electronic Devices Engineering Council (JEDEC) 14.2 Committee on Wafer Level Reliability standard, JESD-35, 'Procedure for the Wafer-Level Testing of Thin Dielectrics'. This procedure was develo...

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Bibliographische Detailangaben
1. Verfasser:	Drager, Steven L
Format:	Report
Sprache:	eng
Schlagworte:	BREAKDOWN(ELECTRONIC THRESHOLD) DIELECTRICS Electrical and Electronic Equipment Electricity and Magnetism ELECTRONIC EQUIPMENT EXPERIMENTAL DATA Inorganic Chemistry INTEGRATED CIRCUITS JEDEC(JOINT ELECTRONIC DEVICES ENGINEERING COUNCIL) JESD-35 OXIDE INTEGRITY OXIDES PE62702F Physical Chemistry RAMPS RELIABILITY SAMPLING STANDARDIZATION TEST EQUIPMENT TEST METHODS THINNESS VOLTAGE VOLTAGE RAMP TEST WAFERS WURL2338017H
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