MM&T Program to Establish Production Techniques for the Automatic Detection and Qualification of Trace Elements Present in the Production of Microwave Semiconductors

Chemical contaminants in materials used in the production of microwave semiconductor diodes adversely affect the device yield. This report explores the relationship between chemical impurities in the solutions used in PIN diode manufacturing and the final yields. It also describes the applicability of spectral analysis technology to ascertaining critical chemical imbalances in the various reagents and solvents. A computer-controlled spectrometer was used to measure trace metals at each of 50 subprocesses in the PIN diode production. These measurements were amalgamated to comprise a database which was then subjected to detailed statistical analysis in an attempt to arrive at a specific relationship between chemical contamination and yield. No such relationship was discovered. The spectral analysis technology proved useful for diagnosing chemical contamination which affected production yield. Specific problems involved in the production process and the resolutions provided through use of spectrometry are discussed. (Author)