Microbeam Analysis Techniques for ICs

The ion microprobe mass analyzer was used for a general chemical characterization of actual integrated circuits. The analysis technique was designed to determine impurities at the surface, in the deposited oxide, in the thermal oxide, in the metallization, and at the various interfaces between these...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: Larrabee,G B, Dobrott,R D
Format: Report
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!