Interaction Between Amorphous Semiconductor Thin Film and Electron Beam

The research program has been directed to obtaining a quantitative understanding of the electron beam recording and readout sensitivity characteristics of amorphous semiconductor thin films. The effort in measuring the electron beam readout sensitivity of various amorphous semiconductor thin films h...

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Bibliographische Detailangaben
1. Verfasser: Chen, Arthur C M
Format: Report
Sprache:eng
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