CATHODE SPUTTERING OF TUNGSTEN

The radioactive isotope method was used to investigate cathode sputtering of a polycrystalline tungsten target, the temperature of which was approximately 1800K. It is assumed that sputtering of a clean surface takes place at such a temperature. In order to prevent evaporation of the target, an inst...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Shustrov,V. A, Ayukhanov,A. Kh
Format:	Report
Sprache:	eng
Schlagworte:	CATHODES Fabrication Metallurgy SPUTTERING TUNGSTEN USSR
Online-Zugang:	Volltext bestellen
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