Effects of Resonator Shape on Nonlinear Resonant Frequencies of a Microresonant Pressure Sensor

A nonlinear dynamics equation for a novel microresonant pressure sensor with a cross-type resonator is proposed. The nonlinear resonant frequencies of the sensor are calculated. Effects of the system parameters and gas pressure on the nonlinear resonant frequencies are investigated. Results show that the effects of nonlinearity on the resonant frequencies increase with increasing length of the resonator, and they decrease with decreasing the clearance between the resonator and the baseplate or gas pressure.