Co-doped p-type ZnO:Al-N Thin Films Grown by RF-Magnetron Sputtering at Room Temperature

This study reports the structural properties of zinc oxide thin films co-doped with aluminum and nitrogen (ZnO:Al-N) grown by RF magnetron sputtering from an AZO (ZnO with 2 wt% Al2O3) target under nitrogen (N2) atmosphere at room temperature (RT). Nitrogen partial pressures of 0.00, 0.10, 0.25 and...

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Bibliographische Detailangaben

Hauptverfasser:	Ramos, Raul, Godoy, Marcio Peron Franco De, Elidiane Cipriano Rangel, Nilson Cristino Da Cruz, Durrant, Steven F., Bortoleto, José Roberto Ribeiro
Format:	Dataset
Sprache:	eng
Schlagworte:	Chemical Engineering not elsewhere classified FOS: Chemical engineering FOS: Materials engineering Materials Engineering not elsewhere classified Metals and Alloy Materials
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