Dataset of the determination of the topographic spatial resolution of a confocal point sensor with a type ASG material measure

These original measurement data relate to the publication: J. Schaude, A. C. Gröschl, T. Hausotte: Effect of a Misidentified Centre of a Type ASG Material Measure on the Determined Topographic Spatial Resolution of an Optical Point Sensor, Metrology 2(1), p. 19-32, 2022, https://doi.org/10.3390/metr...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	Schaude, Janik, Hausotte, Tino
Format:	Dataset
Sprache:	eng
Schlagworte:	confocal sensor lateral period limit nano measuring machine Siemens star surface metrology topographic spatial resolution type ASG material measure
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