Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM
In this work, the authors employed Peak Force tapping and force spectroscopy to evaluate the stress generated during the fabrication of doubly clamped, suspended silicon nanobeams with rectangular section. The silicon beams, released at the last step of fabrication, present a curved shape that sugge...
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creator | Lorenzoni, Matteo Llobet Sixto, Jordi Gramazio, Federico Sansa Perna, Marc Fraxedas, Jordi Pérez Murano, Francesc |
description | In this work, the authors employed Peak Force tapping and force spectroscopy to evaluate the stress generated during the fabrication of doubly clamped, suspended silicon nanobeams with rectangular section. The silicon beams, released at the last step of fabrication, present a curved shape that suggests a bistable buckling behavior, typical for structures that retain a residual compressive stress. Both residual stress and Young's modulus were extracted from experimental data using two different methodologies: analysis of beam deflection profiles and tip-induced mechanical bending. The results from the two methods are compared, providing an insight into the possible limitations of both methods. |
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The silicon beams, released at the last step of fabrication, present a curved shape that suggests a bistable buckling behavior, typical for structures that retain a residual compressive stress. Both residual stress and Young's modulus were extracted from experimental data using two different methodologies: analysis of beam deflection profiles and tip-induced mechanical bending. The results from the two methods are compared, providing an insight into the possible limitations of both methods.</description><language>eng</language><subject>Analysis of beams ; Buckling behaviors ; Curved shapes ; Force spectroscopy ; Mechanical bending ; Peak-force tappings ; Rectangular section ; Residual compressive stress</subject><creationdate>2016</creationdate><rights>open access Aquest document està subjecte a una llicència d'ús Creative Commons. Es permet la reproducció total o parcial, la distribució, la comunicació pública de l'obra i la creació d'obres derivades, fins i tot amb finalitats comercials, sempre i quan es reconegui l'autoria de l'obra original. https://creativecommons.org/licenses/by/4.0</rights><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><link.rule.ids>230,776,881,26951</link.rule.ids><linktorsrc>$$Uhttps://recercat.cat/handle/2072/500875$$EView_record_in_Consorci_de_Serveis_Universitaris_de_Catalunya_(CSUC)$$FView_record_in_$$GConsorci_de_Serveis_Universitaris_de_Catalunya_(CSUC)$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>Lorenzoni, Matteo</creatorcontrib><creatorcontrib>Llobet Sixto, Jordi</creatorcontrib><creatorcontrib>Gramazio, Federico</creatorcontrib><creatorcontrib>Sansa Perna, Marc</creatorcontrib><creatorcontrib>Fraxedas, Jordi</creatorcontrib><creatorcontrib>Pérez Murano, Francesc</creatorcontrib><title>Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM</title><description>In this work, the authors employed Peak Force tapping and force spectroscopy to evaluate the stress generated during the fabrication of doubly clamped, suspended silicon nanobeams with rectangular section. The silicon beams, released at the last step of fabrication, present a curved shape that suggests a bistable buckling behavior, typical for structures that retain a residual compressive stress. Both residual stress and Young's modulus were extracted from experimental data using two different methodologies: analysis of beam deflection profiles and tip-induced mechanical bending. The results from the two methods are compared, providing an insight into the possible limitations of both methods.</description><subject>Analysis of beams</subject><subject>Buckling behaviors</subject><subject>Curved shapes</subject><subject>Force spectroscopy</subject><subject>Mechanical bending</subject><subject>Peak-force tappings</subject><subject>Rectangular section</subject><subject>Residual compressive stress</subject><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2016</creationdate><recordtype>article</recordtype><sourceid>XX2</sourceid><recordid>eNqdjM0KwjAQhHPxIOo77AsItVLqtUiLF096L9tk0wbSpOSn4tubgODdwzAz8M1smWxX1BGDMiOEiYDbeXHkvVoJfMgJRjLkMJAAEV3mJA5O8bSxBqyEhwJh46DfwDXOS-IMGjsQzh5eKkzQdPc920jUng5f37FT1z6vtyP3kfeOOLl02FtUv5JVFnXZV0VxqavzP5sP_VlMzA</recordid><startdate>2016</startdate><enddate>2016</enddate><creator>Lorenzoni, Matteo</creator><creator>Llobet Sixto, Jordi</creator><creator>Gramazio, Federico</creator><creator>Sansa Perna, Marc</creator><creator>Fraxedas, Jordi</creator><creator>Pérez Murano, Francesc</creator><scope>XX2</scope></search><sort><creationdate>2016</creationdate><title>Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM</title><author>Lorenzoni, Matteo ; Llobet Sixto, Jordi ; Gramazio, Federico ; Sansa Perna, Marc ; Fraxedas, Jordi ; Pérez Murano, Francesc</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-csuc_recercat_oai_recercat_cat_2072_5008753</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2016</creationdate><topic>Analysis of beams</topic><topic>Buckling behaviors</topic><topic>Curved shapes</topic><topic>Force spectroscopy</topic><topic>Mechanical bending</topic><topic>Peak-force tappings</topic><topic>Rectangular section</topic><topic>Residual compressive stress</topic><toplevel>online_resources</toplevel><creatorcontrib>Lorenzoni, Matteo</creatorcontrib><creatorcontrib>Llobet Sixto, Jordi</creatorcontrib><creatorcontrib>Gramazio, Federico</creatorcontrib><creatorcontrib>Sansa Perna, Marc</creatorcontrib><creatorcontrib>Fraxedas, Jordi</creatorcontrib><creatorcontrib>Pérez Murano, Francesc</creatorcontrib><collection>Recercat</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>Lorenzoni, Matteo</au><au>Llobet Sixto, Jordi</au><au>Gramazio, Federico</au><au>Sansa Perna, Marc</au><au>Fraxedas, Jordi</au><au>Pérez Murano, Francesc</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM</atitle><date>2016</date><risdate>2016</risdate><abstract>In this work, the authors employed Peak Force tapping and force spectroscopy to evaluate the stress generated during the fabrication of doubly clamped, suspended silicon nanobeams with rectangular section. The silicon beams, released at the last step of fabrication, present a curved shape that suggests a bistable buckling behavior, typical for structures that retain a residual compressive stress. Both residual stress and Young's modulus were extracted from experimental data using two different methodologies: analysis of beam deflection profiles and tip-induced mechanical bending. The results from the two methods are compared, providing an insight into the possible limitations of both methods.</abstract><oa>free_for_read</oa></addata></record> |
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subjects | Analysis of beams Buckling behaviors Curved shapes Force spectroscopy Mechanical bending Peak-force tappings Rectangular section Residual compressive stress |
title | Evaluating the compressive stress generated during fabrication of Si doubly clamped nanobeams with AFM |
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