$Sigma\Delta Effects and Charge Locking in Capacitive MEMS Under Dielectric Charge Control$

Sigma\Delta Effects and Charge Locking in Capacitive MEMS Under Dielectric Charge Control

This work investigates, analytically and experimentally, the effects induced by the use of a first-order sigma-delta (ΣΔ) feedback loop as a control method of dielectric charging for capacitive microelectromechanical systems (MEMS). This technique allows setting of a desired level of net charge in t...

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Veröffentlicht in:	IEEE transactions on circuits and systems. II, Express briefs Express briefs, 2017-02, Vol.64 (2), p.206-210
Hauptverfasser:	Giounanlis, Panagiotis, Gorreta, Sergi, Dominguez-Pumar, Manuel, Pons-Nin, Joan, Feely, Orla, Blokhina, Elena
Format:	Artikel
Sprache:	eng
Schlagworte:	Capacitance Charge carrier processes Descàrregues elèctriques Dielectric charging control Dielectrics Discharges (electric) Electric discharges Electrodes Enginyeria electrònica Mathematical model MEMS control MEMS reliability Microelectromechanical systems Microelectrònica Micromechanical devices Sistemes microelectromecànics Àrees temàtiques de la UPC
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