Effect of the base pressure achieved prior deposition on the main properties of ZnO:Al films obtained by DC magnetron sputtering at room temperature for electrical contact use

The effect that the base pressure achieved prior to deposition has upon the electrical, optical, structural, and chemical properties of ZnO:Al [aluminum-zinc oxide (AZO)] thin films was studied. The thin films were obtained at room temperature on glass substrates by direct-current magnetron sputteri...

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Veröffentlicht in:	Journal of vacuum science & technology. A, Vacuum, surfaces, and films Vacuum, surfaces, and films, 2017-03, Vol.35 (2)
Hauptverfasser:	García-Valenzuela, Jorge A., Andreu, Jordi, Bertomeu, Joan
Format:	Artikel
Sprache:	eng
Schlagworte:	Alumini Aluminum Buit (Tecnologia) Electric resistance Pel·lícules fines Resistència elèctrica Thin films Vacuum technology
Online-Zugang:	Volltext
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