DESIGN AND CHARACTERIZATION OF THERMALLY ACTUATED BIMETALLIC MEMBRANES BY MICHELSON INTERFEROMETRY

DESIGN AND CHARACTERIZATION OF THERMALLY ACTUATED BIMETALLIC MEMBRANES BY MICHELSON INTERFEROMETRY

This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Mi...

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Veröffentlicht in:Dyna (Medellín, Colombia) Colombia), 2011, Vol.166, p.75-80
Hauptverfasser: DUARTE, Julio Enrique, FERNANDEZ MORALES, Flavio Humberto, MARTIN-BADOSA, Estela
Format: Artikel
Sprache:eng
Schlagworte:
Bimetallism
Bimetal·lisme
Exact sciences and technology
Finite element method
General equipment and techniques
Instruments, apparatus, components and techniques common to several branches of physics and astronomy
Interferometria
Interferometry
Mètode dels elements finits
Physics
Transducers
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Beschreibung
Zusammenfassung:This paper presents the design and characterization of thermally actuated Al-Si bimetallic membranes. The design was made with the Finite Element Method and was emphasized on optimizing the thickness ratio between the aluminum and silicon layers. The membrane deflection was measured employing the Michelson Interferometer. The experimental process was carried out with square membranes of 5 mm of side length, 10 mm in silicon thickness, and an aluminum thicknesses of 4 and 1 mm. A maximum deflection of 14 mm was obtained for membranes with 4 mm of aluminum thickness, which is consistent with predictions made by numerical calculations.
ISSN:0012-7353