Microcrystalline silicon thin film transistors obtained by hot-wire CVD

Polysilicon thin film transistors (TFT) are of great interest in the field of large area microelectronics, especially because of their application as active elements in flat panel displays. Different deposition techniques are in tough competition with the objective to obtain device-quality polysilic...

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Veröffentlicht in:	Materials science & engineering. B, Solid-state materials for advanced technology Solid-state materials for advanced technology, 2000, Vol.69, p.526-529
Hauptverfasser:	Puigdollers, J, Dosev, D, Orpella, A, Voz, C, Peiro, D, Bertomeu, J, Marsal, L.F, Pallares, J, Andreu, J, Alcubilla, R
Format:	Artikel
Sprache:	eng
Schlagworte:	Applied sciences Chemical vapor deposition Cèl·lules solars Deposició química en fase vapor Electronics Exact sciences and technology Hot-wire CVD Microcrystalline silicon Microelectronics Microelectrònica Pel·lícules fines Semiconductor electronics. Microelectronics. Optoelectronics. Solid state devices Semiconductors Silici Silicon Solar cells Thin film transistors Thin films Transistors
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