Third order intermodulation distorsion in film bulk acoustic resonators at resonance and antiresonance

This paper presents recent measurements and modeling of the third order intermodulation products of a Film Bulk Acoustic Resonator (FBAR), for a various values of frequency spacing between driving tones. The frequency dependence of voltage and current in the acoustic branch rules out a voltage-depen...

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Hauptverfasser: Rocas Cantenys, Eduard, Collado Gómez, Juan Carlos, Mateu Mateu, Jordi, Campanella, Humberto, O'Callaghan Castellà, Juan Manuel
Format: Tagungsbericht
Sprache:eng
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