Suppression of Air Disturbance by Ultrasonic Standing Wave for Improvement of Vision Sensing

Bonding machines suffer from a problem that a wavering disturbance of air occurs due to heaters and decreases the accuracy of vision sensing for tool positioning. Previous solutions use airflow to clear out heated air from the light path or physical/airflow walls to separate heated air from backgrou...

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Veröffentlicht in:	Keisoku Jidō Seigyo Gakkai ronbunshū 2016, Vol.52(10), pp.518-523
Hauptverfasser:	HOSHI, Takayuki, HAYATA, Shigeru
Format:	Artikel
Sprache:	eng
Schlagworte:	air disturbance refractive index thermal convection ultrasonic standing wave vision sensing
Online-Zugang:	Volltext
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