Electrical detection and analysis of surface acoustic wave in line-defect two-dimensional piezoelectric phononic crystals
Line-defect piezoelectric phononic crystals (PCs) show good potential applications in surface acoustic wave (SAW) MEMS devices for RF communication systems. To analyze the SAW characteristics in line-defect two-dimensional (2D) piezoelectric PCs, optical methods are commonly used. However, the optic...
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| Veröffentlicht in: | Japanese Journal of Applied Physics 2018-03, Vol.57 (3), p.34001 |
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| container_title | Japanese Journal of Applied Physics |
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| creator | Cai, Feida Li, Honglang Tian, Yahui Ke, Yabing Cheng, Lina Lou, Wei He, Shitang |
| description | Line-defect piezoelectric phononic crystals (PCs) show good potential applications in surface acoustic wave (SAW) MEMS devices for RF communication systems. To analyze the SAW characteristics in line-defect two-dimensional (2D) piezoelectric PCs, optical methods are commonly used. However, the optical instruments are complex and expensive, whereas conventional electrical methods can only measure SAW transmission of the whole device and lack spatial resolution. In this paper, we propose a new electrical experimental method with multiple receiving interdigital transducers (IDTs) to detect the SAW field distribution, in which an array of receiving IDTs of equal aperture was used to receive the SAW. For this new method, SAW delay lines with perfect and line-defect 2D Al/128°YXLiNbO3 piezoelectric PCs on the transmitting path were designed and fabricated. The experimental results showed that the SAW distributed mainly in the line-defect region, which agrees with the theoretical results. |
| doi_str_mv | 10.7567/JJAP.57.034001 |
| format | Article |
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To analyze the SAW characteristics in line-defect two-dimensional (2D) piezoelectric PCs, optical methods are commonly used. However, the optical instruments are complex and expensive, whereas conventional electrical methods can only measure SAW transmission of the whole device and lack spatial resolution. In this paper, we propose a new electrical experimental method with multiple receiving interdigital transducers (IDTs) to detect the SAW field distribution, in which an array of receiving IDTs of equal aperture was used to receive the SAW. For this new method, SAW delay lines with perfect and line-defect 2D Al/128°YXLiNbO3 piezoelectric PCs on the transmitting path were designed and fabricated. The experimental results showed that the SAW distributed mainly in the line-defect region, which agrees with the theoretical results.</description><identifier>ISSN: 0021-4922</identifier><identifier>EISSN: 1347-4065</identifier><identifier>DOI: 10.7567/JJAP.57.034001</identifier><identifier>CODEN: JJAPB6</identifier><language>eng</language><publisher>Tokyo: The Japan Society of Applied Physics</publisher><subject>Defects ; Delay lines ; Electronic devices ; Interdigital transducers ; Measurement methods ; Microelectromechanical systems ; Optical instruments ; Optics ; Piezoelectricity ; Radio frequency ; Spatial resolution ; Surface acoustic waves</subject><ispartof>Japanese Journal of Applied Physics, 2018-03, Vol.57 (3), p.34001</ispartof><rights>2018 The Japan Society of Applied Physics</rights><rights>Copyright Japanese Journal of Applied Physics Mar 2018</rights><lds50>peer_reviewed</lds50><woscitedreferencessubscribed>false</woscitedreferencessubscribed><cites>FETCH-LOGICAL-c356t-9682befdbef5f5d69374c7310fb9afdb4ad9435705f258fad9037cb2ba1b144d3</cites></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktopdf>$$Uhttps://iopscience.iop.org/article/10.7567/JJAP.57.034001/pdf$$EPDF$$P50$$Giop$$H</linktopdf><link.rule.ids>314,780,784,27924,27925,53846,53893</link.rule.ids></links><search><creatorcontrib>Cai, Feida</creatorcontrib><creatorcontrib>Li, Honglang</creatorcontrib><creatorcontrib>Tian, Yahui</creatorcontrib><creatorcontrib>Ke, Yabing</creatorcontrib><creatorcontrib>Cheng, Lina</creatorcontrib><creatorcontrib>Lou, Wei</creatorcontrib><creatorcontrib>He, Shitang</creatorcontrib><title>Electrical detection and analysis of surface acoustic wave in line-defect two-dimensional piezoelectric phononic crystals</title><title>Japanese Journal of Applied Physics</title><addtitle>Jpn. J. Appl. Phys</addtitle><description>Line-defect piezoelectric phononic crystals (PCs) show good potential applications in surface acoustic wave (SAW) MEMS devices for RF communication systems. To analyze the SAW characteristics in line-defect two-dimensional (2D) piezoelectric PCs, optical methods are commonly used. However, the optical instruments are complex and expensive, whereas conventional electrical methods can only measure SAW transmission of the whole device and lack spatial resolution. In this paper, we propose a new electrical experimental method with multiple receiving interdigital transducers (IDTs) to detect the SAW field distribution, in which an array of receiving IDTs of equal aperture was used to receive the SAW. For this new method, SAW delay lines with perfect and line-defect 2D Al/128°YXLiNbO3 piezoelectric PCs on the transmitting path were designed and fabricated. The experimental results showed that the SAW distributed mainly in the line-defect region, which agrees with the theoretical results.</description><subject>Defects</subject><subject>Delay lines</subject><subject>Electronic devices</subject><subject>Interdigital transducers</subject><subject>Measurement methods</subject><subject>Microelectromechanical systems</subject><subject>Optical instruments</subject><subject>Optics</subject><subject>Piezoelectricity</subject><subject>Radio frequency</subject><subject>Spatial resolution</subject><subject>Surface acoustic waves</subject><issn>0021-4922</issn><issn>1347-4065</issn><fulltext>true</fulltext><rsrctype>article</rsrctype><creationdate>2018</creationdate><recordtype>article</recordtype><recordid>eNp1kM1LwzAYxoMoOKdXzwEvIrQmTdKsxzHmxxjoQc8hzQemdE1NOsf8683owIseXt4Pfs_DywPANUY5ZyW_X63mrznjOSIUIXwCJphQnlFUslMwQajAGa2K4hxcxNiktWQUT8B-2Ro1BKdkC7UZ0ux8B2WnU8l2H12E3sK4DVYqA6Xy2zg4BXfyy0DXwdZ1JtPGJh0cdj7TbmO6mCySXe_MtzdHe9h_-M53aVBhHwfZxktwZlMzV8c-Be8Py7fFU7Z-eXxezNeZIqwcsqqcFbWxOhWzTJcV4VRxgpGtK5nOVOqKEsYRswWb2bQhwlVd1BLXmFJNpuBm9O2D_9yaOIjGb0N6MIoCUV7galaSROUjpYKPMRgr-uA2MuwFRuIQrzjEKxgXY7xJcDcKnO9_Hf-Fb_-Am0b2B4gcMdFrS34ARNCLFg</recordid><startdate>20180301</startdate><enddate>20180301</enddate><creator>Cai, Feida</creator><creator>Li, Honglang</creator><creator>Tian, Yahui</creator><creator>Ke, Yabing</creator><creator>Cheng, Lina</creator><creator>Lou, Wei</creator><creator>He, Shitang</creator><general>The Japan Society of Applied Physics</general><general>Japanese Journal of Applied Physics</general><scope>AAYXX</scope><scope>CITATION</scope><scope>7U5</scope><scope>8FD</scope><scope>H8D</scope><scope>L7M</scope></search><sort><creationdate>20180301</creationdate><title>Electrical detection and analysis of surface acoustic wave in line-defect two-dimensional piezoelectric phononic crystals</title><author>Cai, Feida ; Li, Honglang ; Tian, Yahui ; Ke, Yabing ; Cheng, Lina ; Lou, Wei ; He, Shitang</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-LOGICAL-c356t-9682befdbef5f5d69374c7310fb9afdb4ad9435705f258fad9037cb2ba1b144d3</frbrgroupid><rsrctype>articles</rsrctype><prefilter>articles</prefilter><language>eng</language><creationdate>2018</creationdate><topic>Defects</topic><topic>Delay lines</topic><topic>Electronic devices</topic><topic>Interdigital transducers</topic><topic>Measurement methods</topic><topic>Microelectromechanical systems</topic><topic>Optical instruments</topic><topic>Optics</topic><topic>Piezoelectricity</topic><topic>Radio frequency</topic><topic>Spatial resolution</topic><topic>Surface acoustic waves</topic><toplevel>peer_reviewed</toplevel><toplevel>online_resources</toplevel><creatorcontrib>Cai, Feida</creatorcontrib><creatorcontrib>Li, Honglang</creatorcontrib><creatorcontrib>Tian, Yahui</creatorcontrib><creatorcontrib>Ke, Yabing</creatorcontrib><creatorcontrib>Cheng, Lina</creatorcontrib><creatorcontrib>Lou, Wei</creatorcontrib><creatorcontrib>He, Shitang</creatorcontrib><collection>CrossRef</collection><collection>Solid State and Superconductivity Abstracts</collection><collection>Technology Research Database</collection><collection>Aerospace Database</collection><collection>Advanced Technologies Database with Aerospace</collection><jtitle>Japanese Journal of Applied Physics</jtitle></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext</fulltext></delivery><addata><au>Cai, Feida</au><au>Li, Honglang</au><au>Tian, Yahui</au><au>Ke, Yabing</au><au>Cheng, Lina</au><au>Lou, Wei</au><au>He, Shitang</au><format>journal</format><genre>article</genre><ristype>JOUR</ristype><atitle>Electrical detection and analysis of surface acoustic wave in line-defect two-dimensional piezoelectric phononic crystals</atitle><jtitle>Japanese Journal of Applied Physics</jtitle><addtitle>Jpn. J. Appl. Phys</addtitle><date>2018-03-01</date><risdate>2018</risdate><volume>57</volume><issue>3</issue><spage>34001</spage><pages>34001-</pages><issn>0021-4922</issn><eissn>1347-4065</eissn><coden>JJAPB6</coden><abstract>Line-defect piezoelectric phononic crystals (PCs) show good potential applications in surface acoustic wave (SAW) MEMS devices for RF communication systems. To analyze the SAW characteristics in line-defect two-dimensional (2D) piezoelectric PCs, optical methods are commonly used. However, the optical instruments are complex and expensive, whereas conventional electrical methods can only measure SAW transmission of the whole device and lack spatial resolution. In this paper, we propose a new electrical experimental method with multiple receiving interdigital transducers (IDTs) to detect the SAW field distribution, in which an array of receiving IDTs of equal aperture was used to receive the SAW. For this new method, SAW delay lines with perfect and line-defect 2D Al/128°YXLiNbO3 piezoelectric PCs on the transmitting path were designed and fabricated. The experimental results showed that the SAW distributed mainly in the line-defect region, which agrees with the theoretical results.</abstract><cop>Tokyo</cop><pub>The Japan Society of Applied Physics</pub><doi>10.7567/JJAP.57.034001</doi><tpages>4</tpages></addata></record> |
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| ispartof | Japanese Journal of Applied Physics, 2018-03, Vol.57 (3), p.34001 |
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| language | eng |
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| source | Institute of Physics Journals |
| subjects | Defects Delay lines Electronic devices Interdigital transducers Measurement methods Microelectromechanical systems Optical instruments Optics Piezoelectricity Radio frequency Spatial resolution Surface acoustic waves |
| title | Electrical detection and analysis of surface acoustic wave in line-defect two-dimensional piezoelectric phononic crystals |
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